Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Masahiko TAKIMOTO | 2022-11-29 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Tomohiro Nakata, Tsutomu Shinohara +1 more | 2022-11-22 |
| 11506294 | Valve device, method for replacing valve body unit of valve device, and valve device assembly method | Kenta KONDO, Tomohiro Nakata, Masahiko Nakazawa, Nobuo Nakamura, Tomoko Yuhara | 2022-11-22 |
| 11306830 | Valve device | Kenta KONDO, Tsutomu Shinohara, Tomohiro Nakata | 2022-04-19 |
| 11261990 | Actuator and valve device | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe +2 more | 2022-03-01 |