Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519769 | Flow rate control system and flow rate measurement method | Masaaki Nagase, Satoru Yamashita, Masayoshi Kawashima, Kouji Nishino, Nobukazu Ikeda | 2022-12-06 |
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara | 2022-11-29 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata +1 more | 2022-11-22 |
| 11416011 | Pressure-type flow control device and flow control method | Katsuyuki Sugita, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Takahiro Imai +1 more | 2022-08-16 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura +1 more | 2022-02-08 |
| 11215374 | Fluid sealing device and pressure detector calibration device | Masaaki Nagase | 2022-01-04 |