Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara +1 more | 2022-11-22 |
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-08-30 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-07-26 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-06-21 |
| 11346505 | Fluid supply system, fluid control device, and semiconductor manufacturing device | Haruhiko Kuriki, Hajime Nakagawa | 2022-05-31 |
| 11340636 | Abnormality diagnosis method of fluid supply line | Ryutaro Tanno, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana +2 more | 2022-05-24 |
| 11320056 | Valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-05-03 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-02-22 |
| 11243549 | Valve and fluid supply line | Ryutaro Tanno, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana +2 more | 2022-02-08 |
| 11231026 | Valve device | Kazunari Watanabe, Kohei Shigyou, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-01-25 |