| 11427911 |
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device |
Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara |
2022-08-30 |
| 11397443 |
Fluid control device and semiconductor manufacturing apparatus |
Kenji Aikawa, Takahiro Matsuda, Toshiyuki Inada, Yuta Motegi, Tomohiro Nakata +1 more |
2022-07-26 |
| 11365830 |
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device |
Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara |
2022-06-21 |
| 11346461 |
Manual valve device and fluid control device |
Tomohiro Nakata, Toshiyuki Inada, Tsutomu Shinohara |
2022-05-31 |
| 11339881 |
Valve device and fluid control device |
Kohei Shigyou, Yohei Sawada, Tomohiro Nakata, Tsutomu Shinohara |
2022-05-24 |
| 11320056 |
Valve device |
Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara |
2022-05-03 |
| 11261990 |
Actuator and valve device |
Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kenta KONDO +2 more |
2022-03-01 |
| 11255458 |
Valve device and fluid control device |
Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Yuta Motegi, Tomohiro Nakata +1 more |
2022-02-22 |
| 11231026 |
Valve device |
Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara |
2022-01-25 |