Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402124 | Fluid heater, fluid control apparatus, and production method for fluid heater | Tsuneyuki Okabe, Taiji Chiba, Tatsuhiko SATO, Michio Yamaji, Tadayuki Yakushijin | 2022-08-02 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-07-26 |
| 11346461 | Manual valve device and fluid control device | Kazunari Watanabe, Tomohiro Nakata, Tsutomu Shinohara | 2022-05-31 |
| 11261990 | Actuator and valve device | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata +1 more | 2022-02-22 |