Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Tomohiro Nakata +1 more | 2022-07-26 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Tomohiro Nakata +1 more | 2022-02-22 |