Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tomohiro Nakata, Tsutomu Shinohara, Takeru Miura | 2022-11-22 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura | 2022-08-02 |
| 11402124 | Fluid heater, fluid control apparatus, and production method for fluid heater | Tsuneyuki Okabe, Toshiyuki Inada, Taiji Chiba, Michio Yamaji, Tadayuki Yakushijin | 2022-08-02 |