Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Tsutomu Shinohara | 2022-11-22 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tatsuhiko SATO, Tsutomu Shinohara, Tomohiro Nakata | 2022-08-02 |
| 11261990 | Actuator and valve device | Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Masahiko TAKIMOTO, Tsutomu Shinohara, Tomohiro Nakata +1 more | 2022-02-08 |