Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara, Masahiko TAKIMOTO | 2022-11-29 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara +1 more | 2022-11-22 |
| 11322372 | Fluid supply device and liquid discharge method of this device | Yukio Minami, Tsutomu Shinohara | 2022-05-03 |
| 11242934 | Valve device | Kenta KONDO, Masahiko TAKIMOTO, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura +1 more | 2022-02-08 |