Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-08-30 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-06-21 |
| 11339881 | Valve device and fluid control device | Kazunari Watanabe, Yohei Sawada, Tomohiro Nakata, Tsutomu Shinohara | 2022-05-24 |
| 11320056 | Valve device | Kazunari Watanabe, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-05-03 |
| 11231026 | Valve device | Kazunari Watanabe, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara | 2022-01-25 |