Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421800 | Flow rate regulating valve and fluid control apparatus using the same | Keigo Kobayashi, Masakazu Nagao, Tadayuki Yakushijin | 2022-08-23 |
| 11391608 | Self-diagnosis method for flow rate control device | Katsuyuki Sugita, Kaoru Hirata, Koji Kawada, Nobukazu Ikeda, Kouji Nishino | 2022-07-19 |
| 11346457 | Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device | Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda | 2022-05-31 |
| 11226257 | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller | Akihiro Harada, Kouji Nishino, Koji Kawada, Katsuyuki Sugita, Nobukazu Ikeda +4 more | 2022-01-18 |