Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Jhin Cho, Yeon-Jin Gil, Kwang-Wook Lee | 2020-10-27 |
| 10795263 | Compositions for removing photoresist | Jung-Min Oh, Mi Hyun Park, Hyo-San Lee, Ji Hoon Jeong, In-Gi Kim +4 more | 2020-10-06 |
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Dong-Gyun Han, Woo-Gwan Shim +3 more | 2020-07-07 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |