Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837115 | Pre-treatment composition before etching SiGe and method of fabricating semiconductor device using the same | Soojin Kim, Hyo-Sun Lee, Hyosan Lee, Donghyun Kim, Haksoo Kim +2 more | 2020-11-17 |
| 10795263 | Compositions for removing photoresist | Mi Hyun Park, Hyo-San Lee, Ji Hoon Jeong, Yong-Sun Ko, In-Gi Kim +4 more | 2020-10-06 |
| 10679843 | Method of treating substrates using supercritical fluids | Ji Hoon Jeong, Kun-Tack Lee, Hyo-San Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Ji Hoon Jeong, Dong-Gyun Han, Kun-Tack Lee, Hyo-San Lee, Yong-Myung Jun | 2020-06-02 |