Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679843 | Method of treating substrates using supercritical fluids | Ji Hoon Jeong, Jung-Min Oh, Hyo-San Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Dong-Gyun Han, Hyo-San Lee, Yong-Myung Jun | 2020-06-02 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Hyo-San Lee | 2020-03-03 |