Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Yong-Jhin Cho, Jihoon Jeong, Yungjun Kim, Kuntack Lee | 2020-11-03 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |