Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Kuntack Lee | 2020-11-03 |
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Sun Ko, Yeon-Jin Gil, Kwang-Wook Lee | 2020-10-27 |