Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Kuntack Lee | 2020-11-03 |