Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Jhin Cho, Yong-Sun Ko, Yeon-Jin Gil | 2020-10-27 |
| 10714499 | Method of manufacturing semiconductor device | Won-Joon Choi, Min Sung Ko, Kyeong Bae Kim, Jong Gi Kim, Dong Sun Sheen +4 more | 2020-07-14 |