Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Yong-Jhin Cho, Yong-Sun Ko, Yeon-Jin Gil, Kwang-Wook Lee | 2020-10-27 |