Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |