Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795263 | Compositions for removing photoresist | Jung-Min Oh, Mi Hyun Park, Ji Hoon Jeong, Yong-Sun Ko, In-Gi Kim +4 more | 2020-10-06 |
| 10679843 | Method of treating substrates using supercritical fluids | Ji Hoon Jeong, Jung-Min Oh, Kun-Tack Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Dong-Gyun Han, Kun-Tack Lee, Yong-Myung Jun | 2020-06-02 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee | 2020-03-03 |
| 10525566 | Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same | Myung-Ki Hong, Yung Jun KIM, Sung Oh PARK, Joo Han Lee, Kyu-min Oh +3 more | 2020-01-07 |