Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795263 | Compositions for removing photoresist | Jung-Min Oh, Mi Hyun Park, Hyo-San Lee, Yong-Sun Ko, In-Gi Kim +4 more | 2020-10-06 |
| 10679843 | Method of treating substrates using supercritical fluids | Jung-Min Oh, Kun-Tack Lee, Hyo-San Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Dong-Gyun Han, Kun-Tack Lee, Hyo-San Lee, Yong-Myung Jun | 2020-06-02 |