Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Dong-Gyun Han, Woo-Gwan Shim +3 more | 2020-07-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Dong-Gyun Han, Woo-Gwan Shim +3 more | 2020-07-07 |