Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Dong-Gyun Han +3 more | 2020-07-07 |