Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847360 | High pressure treatment of silicon nitride film | Keith Tatseun Wong, Srinivas D. Nemani, Ellie Yieh | 2020-11-24 |
| 10720341 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Ellie Yieh | 2020-07-21 |
| 10636704 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Keith Tatseun Wong, He Ren, Mehul Naik, Ellie Yieh +1 more | 2020-04-28 |
| 10622214 | Tungsten defluorination by high pressure treatment | Keith Tatseun Wong, Thomas Jongwan Kwon, Ellie Yieh | 2020-04-14 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Katsumasa Kawasaki, Chunlei Zhang | 2020-03-17 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik +1 more | 2020-01-07 |