Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120285 | Developing method, developing apparatus and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-10-16 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10068763 | Coating film forming method, coating film forming apparatus, and storage medium | Takafumi Niwa | 2018-09-04 |
| 10048664 | Coating method, computer storage medium and coating apparatus | Takafumi Hasimoto, Shinichi Hatakeyama, Naoki Shibata, Minoru Kubota, Hiroyuki Ide | 2018-08-14 |
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Takahiro Ookubo, Yusuke Yamamoto, Steffen Hornig | 2018-07-31 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-07-17 |
| 10022652 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-07-17 |
| 9947534 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Koji Takayanagi, Shinichi Hatakeyama, Kohei Kawakami | 2018-04-17 |
| 9878267 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-01-30 |