Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120286 | Developing method, developing apparatus, and computer-readable recording medium | Tomohiro Iseki, Hirofumi Takeguchi | 2018-11-06 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-10-16 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Kousuke Yoshihara, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-07-17 |
| 9972512 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Teruhiko Kodama | 2018-05-15 |
| 9952512 | Developing method, developing apparatus, and computer-readable storage medium | Hirofumi Takeguchi, Tomohiro Iseki | 2018-04-24 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Gousuke Shiraishi, Tomohiro Iseki, Masaru Tomono, Hironori Mizoguchi | 2018-02-20 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-01-30 |