Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Koji Takayanagi, Takashi Sasa | 2018-09-11 |
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Takahiro Ookubo, Kousuke Yoshihara, Yusuke Yamamoto, Steffen Hornig | 2018-07-31 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-07-17 |
| 9975073 | Processing liquid supply method, processing liquid supply apparatus and storage medium | Yuichi Yoshida, Ryouichirou Naitou | 2018-05-22 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-01-30 |