Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Yuichi Terashita, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10062669 | Semiconductor device | — | 2018-08-28 |
| 9991140 | Substrate heating device, substrate heating method and computer-readable storage medium | Masato Mizuta | 2018-06-05 |
| 9947534 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Kousuke Yoshihara, Shinichi Hatakeyama, Kohei Kawakami | 2018-04-17 |
| 9948090 | Semiconductor device | Masashi Arakawa, Tadashi Fukui | 2018-04-17 |
| 9948283 | Semiconductor device | — | 2018-04-17 |