Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991140 | Substrate heating device, substrate heating method and computer-readable storage medium | Koji Takayanagi | 2018-06-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991140 | Substrate heating device, substrate heating method and computer-readable storage medium | Koji Takayanagi | 2018-06-05 |