KK

Kohei Kawakami

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #339,052 of 503,207Top 70%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9947534 Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control Kousuke Yoshihara, Koji Takayanagi, Shinichi Hatakeyama 2018-04-17