Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139732 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Hiroshi Mizunoura | 2018-11-27 |
| 10048664 | Coating method, computer storage medium and coating apparatus | Takafumi Hasimoto, Naoki Shibata, Kousuke Yoshihara, Minoru Kubota, Hiroyuki Ide | 2018-08-14 |
| 9947534 | Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control | Kousuke Yoshihara, Koji Takayanagi, Kohei Kawakami | 2018-04-17 |