Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035173 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Kousuke Yoshihara, Yusuke Yamamoto, Steffen Hornig | 2018-07-31 |
| 10016885 | Impact tool | — | 2018-07-10 |