HT

Hirofumi Takeguchi

TL Tokyo Electron Limited: 4 patents #27 of 733Top 4%
Overall (2018): #44,529 of 503,207Top 9%
4
Patents 2018

Issued Patents 2018

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10120286 Developing method, developing apparatus, and computer-readable recording medium Tomohiro Iseki, Yuichi Terashita 2018-11-06
10022652 Solution treatment apparatus and solution treatment method Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more 2018-07-17
9952512 Developing method, developing apparatus, and computer-readable storage medium Tomohiro Iseki, Yuichi Terashita 2018-04-24
9878267 Solution treatment apparatus and solution treatment method Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more 2018-01-30