Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Kousuke Yoshihara, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-10-16 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Gousuke Shiraishi, Kousuke Yoshihara, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-07-17 |