Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-10-16 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-07-17 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Yuichi Terashita, Gousuke Shiraishi, Tomohiro Iseki, Hironori Mizoguchi | 2018-02-20 |