TN

Takafumi Niwa

TL Tokyo Electron Limited: 2 patents #120 of 733Top 20%
Overall (2018): #97,799 of 503,207Top 20%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10068763 Coating film forming method, coating film forming apparatus, and storage medium Kousuke Yoshihara 2018-09-04
9972512 Liquid processing method, memory medium and liquid processing apparatus Akiko Kai, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita, Teruhiko Kodama 2018-05-15