Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Taro Yamamoto, Hideharu Kyouda, Koshi MUTA | 2018-04-17 |
| 9869941 | Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium | Ryoichi Uemura | 2018-01-16 |