Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128136 | Liquid processing apparatus and liquid processing method | Masahiro Fukuda, Hiroshi Ichinomiya, Koichi Obata, Kouichirou Tanaka | 2018-11-13 |
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Hideharu Kyouda, Koshi MUTA | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Yasushi Takiguchi, Hideharu Kyouda, Koshi MUTA | 2018-04-17 |