KO

Koichi Obata

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #338,574 of 503,207Top 70%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10128136 Liquid processing apparatus and liquid processing method Masahiro Fukuda, Hiroshi Ichinomiya, Taro Yamamoto, Kouichirou Tanaka 2018-11-13