Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162258 | Pellicle fabrication methods and structures thereof | Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku, Wei-Jen Lo +3 more | 2018-12-25 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai +3 more | 2018-07-03 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Hsin-Chang Lee, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9995999 | Lithography mask | Hsin-Chang Lee, Chia-Jen Chen, Anthony Yen | 2018-06-12 |
| 9864270 | Pellicle and method for manufacturing the same | Jeng-Shin Ma, Tsiao-Chen Wu, Chi-Ming Yang, Chyi Shyuan Chern, Chih-Cheng Lin | 2018-01-09 |