Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156783 | Image mask film scheme and method | Chih-Chiang Tu, Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2018-12-18 |
| 10157805 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Chun-Lang Chen, Shih-Hao Yang | 2018-12-18 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |