Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162276 | Apparatus for shielding reticle | Wen-Hao Cheng, Tsiao-Chen Wu | 2018-12-25 |
| 10126666 | Apparatus and a method of forming a particle shield | Ching-Yueh Chen, Wen-Hao Cheng | 2018-11-13 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Jong-Yuh Chang, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |