Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157805 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Shih-Hao Yang, Jong-Yuh Chang | 2018-12-18 |
| 10156783 | Image mask film scheme and method | Chih-Chiang Tu, Jong-Yuh Chang, Boming Hsu, Tran-Hui Shen | 2018-12-18 |
| 10095102 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2018-10-09 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |
| 10007176 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu | 2018-06-26 |
| 9953833 | Semiconductor mask blanks with a compatible stop layer | Chih-Chiang Tu, Boming Hsu, Tran-Hui Shen | 2018-04-24 |
| 9921467 | Mask blank and mask and fabrication method thereof | Chih-Chiang Tu | 2018-03-20 |