Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156783 | Image mask film scheme and method | Chun-Lang Chen, Jong-Yuh Chang, Boming Hsu, Tran-Hui Shen | 2018-12-18 |
| 10102615 | Method and system for detecting hotspots in semiconductor wafer | Wen-Hao Cheng, Peng Chen | 2018-10-16 |
| 10095102 | Photomask having a plurality of shielding layers | Chun-Lang Chen | 2018-10-09 |
| 10025175 | Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device | Chi-Ming Tsai, Wen-Hao Cheng, Ru-Gun Liu, Shuo-Yen Chou | 2018-07-17 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |
| 10007176 | Graphene pellicle for extreme ultraviolet lithography | Chun-Lang Chen | 2018-06-26 |
| 9953833 | Semiconductor mask blanks with a compatible stop layer | Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2018-04-24 |
| 9921467 | Mask blank and mask and fabrication method thereof | Chun-Lang Chen | 2018-03-20 |