Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157801 | Detecting the cleanness of wafer after post-CMP cleaning | Yu-Ting Yen, Hui-Chi Huang | 2018-12-18 |
| 10151971 | System for and method of seeding an optical proximity correction (OPC) process | Yin-Chuan Chen, Shin-Huang Chen | 2018-12-11 |
| 10062645 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Liang-Guang Chen | 2018-08-28 |
| 10025175 | Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device | Chih-Chiang Tu, Wen-Hao Cheng, Ru-Gun Liu, Shuo-Yen Chou | 2018-07-17 |