Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157801 | Detecting the cleanness of wafer after post-CMP cleaning | Yu-Ting Yen, Chi-Ming Tsai | 2018-12-18 |
| 9966281 | Methods and systems for chemical mechanical polish cleaning | Chien-Ping Lee | 2018-05-08 |
| 9859165 | Planarization process for forming semiconductor device structure | Li-Chieh Wu | 2018-01-02 |