Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157801 | Detecting the cleanness of wafer after post-CMP cleaning | Chi-Ming Tsai, Hui-Chi Huang | 2018-12-18 |
| 10115848 | Method of transferring thin film | Yu-Lun Chueh, Kuan-Chun Tseng | 2018-10-30 |