Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109523 | Method of cleaning wafer after CMP | Chien-Hao Chung, Chang-Sheng Lin, Kuo-Feng Huang, Chun-Chieh Lin | 2018-10-23 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Liang-Guang Chen, Shich-Chang Suen | 2018-03-13 |
| 9859165 | Planarization process for forming semiconductor device structure | Hui-Chi Huang | 2018-01-02 |