Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157781 | Method for forming semiconductor structure using polishing process | Chun-Wei Hsu, Chi-Jen Liu, Cheng-Chun Chang, Yi-Sheng Lin, Pinlei Edmund Chu | 2018-12-18 |
| 10062645 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2018-08-28 |
| 9987720 | Method for operating a polishing head and method for polishing a substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2018-06-05 |
| 9962805 | Chemical mechanical polishing apparatus and method | Ting-Kui Chang, Fu-Ming Huang, Chun-Chieh Lin | 2018-05-08 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2018-03-13 |